Design and Fabrication of Microelectromechanical Devices
MIT OpenCourseWare offers this graduate-level introduction to microsystem design, cross-listed as 6.777J/2.372J. Lectures cover material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifier feedback systems. Student teams apply this material directly, designing microsystems such as optical MEMS, bioMEMS, and inertial sensors to meet stated performance specifications like sensitivity and signal-to-noise ratio, using a realistic fabrication process. Modeling and simulation tools are emphasized throughout the design work rather than treated as an afterthought. Prior fabrication experience is recommended but not required. Course materials include lecture notes, design problem sets, and project specifications reflecting MIT's own engineering design curriculum, worth 4 Engineering Design Points on campus. No certificate is offered; materials are free to access and use under MIT's open license.