Submicrometer and Nanometer Technology
MIT OpenCourseWare offers this graduate-level survey of techniques for fabricating and analyzing structures at the submicron and nanometer scale. Topics include optical and electron microscopy, surface characterization and preparation methods, resist technology, and lithography approaches spanning optical projection, interferometric, X-ray, ion, and electron beam methods. The course also covers aqueous, ion, and plasma etching, lift-off and electroplating processes, and ion implantation. Applications discussed include microelectronics, microphotonics, information storage, and broader nanotechnology uses. As with other MIT OCW offerings, materials are published under an open license and include the course syllabus and readings, letting self-learners study the same technical content used in MIT's own classroom, though this listing does not include graded assignments or a certificate.