Micro/Nano Processing Technology
Micro and nano fabrication forms the core of this MIT OpenCourseWare course, covering the theory and practice behind building semiconductor devices. Lectures and laboratory sessions work through core processing steps including diffusion, oxidation, photolithography, and chemical vapor deposition. Team-based lab assignments give students hands on experience combining these techniques into full device fabrication sequences, using cleanroom equipment and modern processing tools. The course materials include lecture notes and lab assignment sheets drawn from MIT's Electrical Engineering and Computer Science and Materials Science and Engineering departments. It suits students who want to understand not just the chemistry and physics behind each step but how those steps are sequenced together to produce a working micro or nano-scale device. As with other MIT OCW offerings, materials are free to access under a Creative Commons license, with no certificate attached.